Multistack structure for an extreme-ultraviolet pellicle...

Journal of Micro/Nanolithography MEMS and MOEMS 2015 / 10 Vol. 14; Iss. 4

Multistack structure for an extreme-ultraviolet pellicle with out-of-band radiation reduction

Lee, Sung-Gyu, Kim, Guk-Jin, Kim, In-Seon, Ahn, Jin-Ho, Park, Jin-Goo, Oh, Hye-Keun
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Volume:
14
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.JMM.14.4.043501
Date:
October, 2015
File:
PDF, 1.49 MB
english, 2015
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