SPIE Proceedings [SPIE SPIE Optical Systems Design - Jena,...

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SPIE Proceedings [SPIE SPIE Optical Systems Design - Jena, Germany (Monday 7 September 2015)] Optical Systems Design 2015: Advances in Optical Thin Films V - Supercomputer modeling of the ion beam sputtering process: full-atomistic level

Lequime, Michel, Macleod, H. Angus, Ristau, Detlev, Grigoriev, F. V., Sulimov, A. V., Kochikov, I. V., Kondakova, O. A., Sulimov, V. B., Tikhonravov, A. V.
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Volume:
9627
Year:
2015
Language:
english
DOI:
10.1117/12.2190938
File:
PDF, 391 KB
english, 2015
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