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SPIE Proceedings [SPIE Symposium on Micromachining and Microfabrication - Santa Clara, CA (Monday 20 September 1999)] MEMS Reliability for Critical and Space Applications - Analysis of manufacturing-scale MEMS reliability testing

Delak, Katya M., Bova, Paul, Hartzell, Allyson L., Woodilla, David J., Lawton, Russell A., Miller, William M., Lin, Gisela, Ramesham, Rajeshuni
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Volume:
3880
Year:
1999
Language:
english
DOI:
10.1117/12.359367
File:
PDF, 1.12 MB
english, 1999
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