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SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 25 January 2003)] Micromachining and Microfabrication Process Technology VIII - Processable high-carbon-yielding polymer for micro- and nanofabrication
Perpall, Mark W., Zengin, Huseyin, Perera, K. Prasanna U., Zhou, Wensheng, Shah, Hiren, Wu, Xinyu, Creager, Stephen E., Smith, Jr., Dennis W., Foulger, Stephen H., Ballato, John M., Yasaitis, John A.,Volume:
4979
Year:
2003
Language:
english
DOI:
10.1117/12.478252
File:
PDF, 686 KB
english, 2003