SPIE Proceedings [SPIE Photonics Europe - Strasbourg, France (Monday 3 April 2006)] MEMS, MOEMS, and Micromachining II - Butt coupled microcantilever in sensing applications
Zinoviev, Kirill, Plaza, Jose Antonio, Cadarso, Víctor, Lechuga, Laura M., Dominguez, Carlos, Ürey, Hakan, El-Fatatry, AymanVolume:
6186
Year:
2006
Language:
english
DOI:
10.1117/12.662393
File:
PDF, 505 KB
english, 2006