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SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California (Sunday 1 August 2010)] Advances in X-Ray/EUV Optics and Components V - Compact extreme ultraviolet source by use of a discharge-produced potassium plasma for surface morphology application
Terauchi, Hiromitsu, Yamaguchi, Mami, Kikuchi, Keisuke, Otsuka, Takamitsu, Higashiguchi, Takeshi, Yugami, Noboru, Yatagai, Toyohiko, Dunne, Padraig, O'Sullivan, Gerry, Khounsary, Ali M., Morawe, ChrisVolume:
7802
Year:
2010
Language:
english
DOI:
10.1117/12.858603
File:
PDF, 570 KB
english, 2010