Two-dimensional, electrostatic finite element study of...

Two-dimensional, electrostatic finite element study of tip–substrate interactions in electric force microscopy of high density interconnect structures

T.S. Gross, C.M. Prindle, K. Chamberlin, N. bin Kamsah, Yuanyan Wu
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Volume:
87
Year:
2001
Language:
english
Pages:
8
DOI:
10.1016/s0304-3991(00)00093-0
File:
PDF, 494 KB
english, 2001
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