Surface modification of a-Si0.60C0.40:H films by...

Microsystem Technologies 2016 / 5 Vol. 22; Iss. 5

Surface modification of a-Si0.60C0.40:H films by Al-assisted photochemical etching: humidity sensing application

Boukezzata, A., Keffous, A., Gabouze, N., Guerbous, L., Ouadjaout, D., Menari, H., Kechouane, M.
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Volume:
22
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-015-2673-6
Date:
May, 2016
File:
PDF, 685 KB
english, 2016
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