Thickness-dependent phase evolution and dielectric property...

Journal of Sol-Gel Science and Technology 2016 / 2 Vol. 77; Iss. 2

Thickness-dependent phase evolution and dielectric property of Hf0.5Zr0.5O2thin films prepared with aqueous precursor

Yan, Yong, Zhou, Dayu, Guo, Chunxia, Xu, Jin, Yang, Xirui, Liang, Hailong, Zhou, Fangyang, Chu, Shichao, Liu, Xiaoying
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Volume:
77
Language:
english
Journal:
Journal of Sol-Gel Science and Technology
DOI:
10.1007/s10971-015-3871-5
Date:
February, 2016
File:
PDF, 2.60 MB
english, 2016
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