![](/img/cover-not-exists.png)
Strain and Electrical Characterization of Boron-Doped SiGeC Layers Grown by Chemical Vapor Deposition
Hållstedt, J, Parent, A, Zhang, S-L, Östling, M, Radamson, H HVolume:
T114
Language:
english
Journal:
Physica Scripta
DOI:
10.1088/0031-8949/2004/T114/006
Date:
January, 2004
File:
PDF, 120 KB
english, 2004