SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Optimized SU-8 UV-lithographical process for a Ka-band filter fabrication
Jin, Peng, Jiang, Kyle, Tan, Jiubin, Lancaster, M. J., Lopez, Jose F., Quan, Chenggen, Chau, Fook Siong, Fernandez, Francisco V., Lopez-Villegas, Jose Maria, Asundi, Anand, Wong, Brian Stephen, de laYear:
2012
Language:
english
DOI:
10.1117/12.621665
File:
PDF, 289 KB
english, 2012