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Method for Fabricating Micro/Nanostructures via Scanning Probe Microscope and Anisotropic Wet Etching
Hu, Kexiang, Wang, QingkangVolume:
13
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2013.7129
Date:
June, 2013
File:
PDF, 1.19 MB
english, 2013