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Surface Kinetics of Titanium Isopropoxide in High Vacuum Chemical Vapor Deposition
Reinke, Michael, Kuzminykh, Yury, Hoffmann, PatrikLanguage:
english
Journal:
The Journal of Physical Chemistry C
DOI:
10.1021/acs.jpcc.5b07177
Date:
October, 2015
File:
PDF, 3.52 MB
english, 2015