SPIE Proceedings [SPIE SPIE Optical Systems Design - Jena, Germany (Monday 7 September 2015)] Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V - A developed method for surface testing based on the scattering interference effect
Duparré, Angela, Geyl, Roland, Tan, Zhongqi, Huang, Yun, Wu, Suyong, Zhang, Xiaobao, Zhang, YiboVolume:
9628
Year:
2015
Language:
english
DOI:
10.1117/12.2191034
File:
PDF, 402 KB
english, 2015