SPIE Proceedings [SPIE SPIE Optical Systems Design - Jena,...

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SPIE Proceedings [SPIE SPIE Optical Systems Design - Jena, Germany (Monday 7 September 2015)] Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V - Possibilities and limitations of imaging spectroscopic reflectometry in optical characterization of thin films

Duparré, Angela, Geyl, Roland, Ohlídal, Miloslav, Ohlidal, Ivan, Nečas, David, Vodák, Jiří, Franta, Daniel, Nádaský, Pavel, Vižd'a, František
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Volume:
9628
Year:
2015
Language:
english
DOI:
10.1117/12.2191052
File:
PDF, 734 KB
english, 2015
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