[IEEE 2002 IEEE International Ultrasonics Symposium - Munich, Germany (8-11 Oct. 2002)] 2002 IEEE Ultrasonics Symposium, 2002. Proceedings. - Oriented lithium niobate layers transferred on 4" [100] silicon wafer for RF SAW devices
Solal, M., Pastureaud, T., Ballandras, S., Aspar, B., Biasse, B., Daniau, W., Hode, J.M., Calisti, S., Laude, V.Year:
2002
Language:
english
DOI:
10.1109/ULTSYM.2002.1193369
File:
PDF, 477 KB
english, 2002