SPIE Proceedings [SPIE SPIE OPTO - San Francisco, California, United States (Saturday 7 February 2015)] Silicon Photonics X - Interferometric microscopy of silicon photonic devices
Reed, Graham T., Watts, Michael R., Rabinovich, William S., Mahon, Rita, Goetz, Peter G., Pruessner, Marcel, Ferraro, Mike S., Park, Doe, Fleet, Erin, DePrenger, Michael J.Volume:
9367
Year:
2015
Language:
english
DOI:
10.1117/12.2077267
File:
PDF, 1.41 MB
english, 2015