![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE Sixth International Conference on Thin Film Physics and Applications - Shanghai, China (Tuesday 25 September 2007)] Sixth International Conference on Thin Film Physics and Applications - Effect of annealing temperature on the structural and optical properties of Al-doped ZnO films by RF magnetron sputtering
Wu, Yuebo, Huang, Bo, Zhang, Liangtang, Wu, Suntao, Shen, Wenzhong, Chu, JunhaoVolume:
6984
Year:
2008
Language:
english
DOI:
10.1117/12.792374
File:
PDF, 508 KB
english, 2008