Microstructure and Properties of Silicon-Incorporated DLC Film Fabricated Using HMDS Gas and RF-PECVD Process
Song, Byung Ju, Song, Woo Jin, Han, Jun Hyun, Kim, Ka Ram, Yoon, Su Jong, Kim, Tae Gyu, Kim, Jin kon, Cho, Hyun, Kim, Gyeung-Ho, Hwang, Dae Youn, Kim, Hye SungVolume:
14
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2014.10101
Date:
December, 2014
File:
PDF, 787 KB
english, 2014