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A Mask-Free Passivation Process for Low Noise Nanopore Devices
Lim, Min-Cheol, Lee, Min-Hyun, Kim, Ki-Bum, Jeon, Tae-Joon, Kim, Young-RokVolume:
15
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2015.10500
Date:
August, 2015
File:
PDF, 555 KB
english, 2015