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[IEEE 2014 20th International Conference on Ion Implantation Technology (IIT) - Portland, OR, USA (2014.6.26-2014.7.4)] 2014 20th International Conference on Ion Implantation Technology (IIT) - Introducing Purion H, a scanned spot beam high current ion implanter
Vanderberg, Bo, Heres, Patrick, Eisner, Edward, Libby, Bruce, Valinski, Joseph, Huff, WestonYear:
2014
Language:
english
DOI:
10.1109/IIT.2014.6940041
File:
PDF, 1.06 MB
english, 2014