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[IEEE TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference - Anchorage, AK, USA (2015.6.21-2015.6.25)] 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - Development of a no-back-plate SOI MEMS condenser microphone
Lo, Sung-Cheng, Lai, Wei-Cheng, Chang, Chun-I, Lo, Yi-Yang, Wang, Chuanwei, Bai, Mingsian R., Fang, WeileunYear:
2015
Language:
english
DOI:
10.1109/TRANSDUCERS.2015.7181115
File:
PDF, 942 KB
english, 2015