SPIE Proceedings [SPIE SPIE Optifab - Rochester, New York,...

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SPIE Proceedings [SPIE SPIE Optifab - Rochester, New York, United States (Monday 12 October 2015)] Optifab 2015 - Systematic error analysis for 3D nanoprofiler tracing normal vector

Bentley, Julie L., Stoebenau, Sebastian, Kudo, Ryota, Tokuta, Yusuke, Nakano, Motohiro, Yamamura, Kazuya, Endo, Katsuyoshi
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Volume:
9633
Year:
2015
Language:
english
DOI:
10.1117/12.2196021
File:
PDF, 917 KB
english, 2015
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