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SPIE Proceedings [SPIE Asia Pacific Symposium on Microelectronics and MEMS - Gold Coast, Australia (Wednesday 27 October 1999)] Electronics and Structures for MEMS - New sensor-on-chip technology for micromechanical acceleration-threshold switches
Wycisk, Michael, Binder, Josef, Michaelis, Sven, Timme, Hans-Joerg, Bergmann, Neil W., Reinhold, Olaf, Tien, Norman C.Volume:
3891
Year:
1999
Language:
english
DOI:
10.1117/12.364462
File:
PDF, 3.42 MB
english, 1999