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SPIE Proceedings [SPIE Smart Materials and MEMS - Melbourne, Australia (Wednesday 13 December 2000)] Smart Electronics and MEMS II - Application of MEMS in microwave and millimeter wave systems
Varadan, Vijay K., Vinoy, K. J., Yoon, Hargsoon, Jose, K. A., Varadan, Vasundara V., Abbott, Derek, Varadan, Vijay K., Boehringer, Karl F.Volume:
4236
Year:
2001
Language:
english
DOI:
10.1117/12.418756
File:
PDF, 971 KB
english, 2001