[IFMBE Proceedings] 3rd International Conference on Nanotechnologies and Biomedical Engineering Volume 55 || Fabrication MEMS Platform for Sensors Applications by Laser Micro Engraving
Sontea, Victor, Tiginyanu, IonVolume:
10.1007/97
Year:
2016
Language:
english
DOI:
10.1007/978-981-287-736-9_69
File:
PDF, 600 KB
english, 2016