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Low-Temperature Plasma-Assisted Atomic Layer Deposition of Silicon Nitride Moisture Permeation Barrier Layers
Andringa, Anne-Marije, Perrotta, Alberto, de Peuter, Koen, Knoops, Harm C. M., Kessels, Wilhelmus M. M., Creatore, MariadrianaVolume:
7
Language:
english
Journal:
ACS Applied Materials & Interfaces
DOI:
10.1021/acsami.5b06801
Date:
October, 2015
File:
PDF, 2.02 MB
english, 2015