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SPIE Proceedings [SPIE MOEMS-MEMS Micro & Nanofabrication - San Jose, CA (Saturday 22 January 2005)] Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV - Low-coherence interferometric absolute distance gauge for study of MEMS structures
Walecki, Wojciech J., Lai, Kevin, Pravdivtsev, Alexander, Souchkov, Vitali, Van, Phuc, Azfar, Talal, Wong, Tim, Lau, S. H., Koo, Ann, Tanner, Danelle M., Ramesham, RajeshuniVolume:
5716
Year:
2005
Language:
english
DOI:
10.1117/12.590013
File:
PDF, 71 KB
english, 2005