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SPIE Proceedings [SPIE MOEMS-MEMS Micro & Nanofabrication - San Jose, CA (Saturday 22 January 2005)] Micromachining Technology for Micro-Optics and Nano-Optics III - Multilayer coating method for x-ray reflectivity enhancement of polysilicon micro-mirrors at 1.54-Å wavelength
Tripp, Marie K., Fabreguette, Francois, Herrmann, Cari F., George, Steven M., Bright, Victor M., Johnson, Eric G., Nordin, Gregory P., Suleski, Thomas J.Volume:
5720
Year:
2005
Language:
english
DOI:
10.1117/12.590429
File:
PDF, 321 KB
english, 2005