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Monitoring of organic contamination in the ambient air of microelectronic clean room by proton-transfer reaction/time-of-flight/mass spectrometry (PTR–ToF–MS)
Hayeck, Nathalie, Temime-Roussel, Brice, Gligorovski, Sasho, Mizzi, Aurélie, Gemayel, Rachel, Tlili, Sabrine, Maillot, Philippe, Pic, Nicolas, Vitrani, Thomas, Poulet, Irène, Wortham, HenriLanguage:
english
Journal:
International Journal of Mass Spectrometry
DOI:
10.1016/j.ijms.2015.09.017
Date:
October, 2015
File:
PDF, 1.49 MB
english, 2015