Plasma FIB: Enlarge your field of view and your field of applications
Garnier, A., Filoni, G., Hrnčíř, T., Hladík, L.Volume:
55
Language:
english
Journal:
Microelectronics Reliability
DOI:
10.1016/j.microrel.2015.07.016
Date:
August, 2015
File:
PDF, 1.80 MB
english, 2015