SPIE Proceedings [SPIE SPIE Optical Metrology - Munich,...

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SPIE Proceedings [SPIE SPIE Optical Metrology - Munich, Germany (Sunday 21 June 2015)] Optical Measurement Systems for Industrial Inspection IX - Point diffraction interferometry based on the use of two pinholes

Lehmann, Peter, Osten, Wolfgang, Albertazzi Gonçalves, Armando, Voznesenskiy, Nikolay B., Ma, Dongmei, Jin, Chunshui, Zhang, Haitao, Yu, Jie, Voznesenskaia, Mariia, Voznesenskaia, Tatiana, Zhang, Wenl
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Volume:
9525
Year:
2015
Language:
english
DOI:
10.1117/12.2184771
File:
PDF, 2.49 MB
english, 2015
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