Focus tolerance influenced by source size in Talbot...

Advanced Optical Technologies 2015 / 01 Vol. 4; Iss. 4

Focus tolerance influenced by source size in Talbot lithography

Sato, Takashi, Yamada, Akiko, Suto, Takeshi
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Volume:
4
Language:
english
Journal:
Advanced Optical Technologies
DOI:
10.1515/aot-2015-0022
Date:
January, 2015
File:
PDF, 862 KB
english, 2015
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