[IEEE 2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) - Cannes, France (2014.4.1-2014.4.4)] 2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) - Low power, MEMS liquid flow sensor with silicone coating electrical insulation
Di Pancrazio, Alessia, Bruschi, Paolo, Piotto, MassimoYear:
2014
Language:
english
DOI:
10.1109/DTIP.2014.7056663
File:
PDF, 360 KB
english, 2014