Enhanced deposition of ZnO films by Li doping using radio...

International Journal of Minerals, Metallurgy and Materials 2015 / 10 Vol. 22; Iss. 10

Enhanced deposition of ZnO films by Li doping using radio frequency reactive magnetron sputtering

Chen, Liang-xian, Liu, Sheng, Li, Cheng-ming, Wang, Yi-chao, Liu, Jin-long, Wei, Jun-jun
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Volume:
22
Language:
english
Journal:
International Journal of Minerals, Metallurgy, and Materials
DOI:
10.1007/s12613-015-1174-z
Date:
October, 2015
File:
PDF, 1.41 MB
english, 2015
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