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SPIE Proceedings [SPIE Symposium on Applied Photonics - Glasgow, United Kingdom (Sunday 21 May 2000)] Micro-Opto-Electro-Mechanical Systems - Bottlenecks of opto-MEMS
Haronian, Dan, Syms, Richard R. A.Volume:
4075
Year:
2000
Language:
english
DOI:
10.1117/12.397919
File:
PDF, 3.89 MB
english, 2000