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Determination of thickness of ultrathin surface films in nanostructures from the energy spectra of reflected electrons
Kupreenko, S. Yu., Orlikovskii, N. A., Rau, E. I., Tagachenkov, A. M., Tatarintsev, A. A.Volume:
60
Language:
english
Journal:
Technical Physics
DOI:
10.1134/S1063784215100205
Date:
October, 2015
File:
PDF, 514 KB
english, 2015