Effect of O2/Ar gas flow ratio on the optical properties...

Thin Solid Films 2015 / 10 Vol. 592

Effect of O2/Ar gas flow ratio on the optical properties and mechanical stress of sputtered HfO2 thin films

Jena, S., Tokas, R.B., Misal, J.S., Rao, K.D., Udupa, D.V., Thakur, S., Sahoo, N.K.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
592
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2015.08.062
Date:
October, 2015
File:
PDF, 1.48 MB
english, 2015
Conversion to is in progress
Conversion to is failed