Impact of polymer curing on two-dimensional and...

Journal of Micro/Nanolithography MEMS and MOEMS 2015 / 10 Vol. 14; Iss. 4

Impact of polymer curing on two-dimensional and three-dimensional shape change in nanoimprint lithography

Chopra, Meghali J., Bonnecaze, Roger T.
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Volume:
14
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.JMM.14.4.044502
Date:
October, 2015
File:
PDF, 3.23 MB
english, 2015
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