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Influence of pulsed Nd 3+ : YAG laser beam profile and wavelength on microscribing of copper and aluminum thin films
Nammi, Srinagalakshmi, Vasa, Nilesh J., Balaganesan, G., Gupta, Sanjay, Mathur, Anil C.Volume:
14
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.JMM.14.4.044503
Date:
October, 2015
File:
PDF, 1.94 MB
english, 2015