Efficient processing of reaction-sintered silicon carbide...

Optical Engineering 2015 / 10 Vol. 54; Iss. 10

Efficient processing of reaction-sintered silicon carbide by anodically oxidation-assisted polishing

Tu, Qunzhang, Shen, Xinmin, Zhou, Jianzhao, He, Xiaohui, Yamamura, Kazuya
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Volume:
54
Language:
english
Journal:
Optical Engineering
DOI:
10.1117/1.OE.54.10.105113
Date:
October, 2015
File:
PDF, 8.72 MB
english, 2015
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