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SPIE Proceedings [SPIE 1994 International Symposium on Optical Interference Coatings - Grenoble, France (Sunday 5 June 1994)] Optical Interference Coatings - Growth monitoring of W/Si multilayers by x-ray reflectivity and kinetic ellipsometry
Lueken, Eike, Ziegler, Eric, Hoeghoej, P., Freund, Andreas K., Gerdau, Erich, Fontaine, Alain, Abeles, FlorinVolume:
2253
Year:
1994
Language:
english
DOI:
10.1117/12.192085
File:
PDF, 231 KB
english, 1994