EELS characterization of TiN grown by the DC sputtering...

Journal of Electron Spectroscopy and Related Phenomena 1999 Vol. 105; Iss. 2-3

EELS characterization of TiN grown by the DC sputtering technique

O Contreras, A Duarte-Moller, G.A Hirata, M Avalos-Borja
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Volume:
105
Year:
1999
Language:
english
Pages:
5
DOI:
10.1016/s0368-2048(99)00061-4
File:
PDF, 250 KB
english, 1999
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