Processing study of SU-8 pillar profiles with high aspect...

Microelectronic Engineering 2016 / 01 Vol. 149

Processing study of SU-8 pillar profiles with high aspect ratio by electron-beam lithography

Ma, Yaqi, Xia, Yifan, Liu, Jianpeng, Zhang, Sichao, Shao, Jinhai, Lu, Bing-Rui, Chen, Yifang
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Volume:
149
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2015.10.013
Date:
January, 2016
File:
PDF, 1.06 MB
english, 2016
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