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[IEEE 2015 International Conference on Microelectronic Test Structures (ICMTS) - Tempe, AZ, USA (2015.3.23-2015.3.26)] Proceedings of the 2015 International Conference on Microelectronic Test Structures - Accelerating 14nm device learning and yield ramp using parallel test structures as part of a new inline parametric test strategy
Moore, Garry, Liao, Jiun-Hsin, McDade, Scott, Verzi, BillYear:
2015
Language:
english
DOI:
10.1109/ICMTS.2015.7106106
File:
PDF, 1.21 MB
english, 2015