[IEEE 2015 International Conference on Microelectronic Test Structures (ICMTS) - Tempe, AZ, USA (2015.3.23-2015.3.26)] Proceedings of the 2015 International Conference on Microelectronic Test Structures - Compact modeling solution of layout dependent effect for FinFET technology
Chen, David C., Lin, Guan Shyan, Lee, Tien Hua, Lee, Ryan, Liu, Y C, Wang, Meng Fan, Cheng, Yi Ching, Wu, D. Y.Year:
2015
Language:
english
DOI:
10.1109/ICMTS.2015.7106119
File:
PDF, 975 KB
english, 2015