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[IEEE 2015 International Conference on Microelectronic Test Structures (ICMTS) - Tempe, AZ, USA (2015.3.23-2015.3.26)] Proceedings of the 2015 International Conference on Microelectronic Test Structures - Monitoring test structure for plasma process induced charging damage using charge-based capacitance measurement (PID-CBCM)
Mori, Shigetaka, Ogawa, Kazuhisa, Oishi, Hidetoshi, Suzuki, Tsuyoshi, Tomita, Manabu, Bairo, Masaaki, Fukuzaki, Yuzo, Ohnuma, HidetoshiYear:
2015
Language:
english
DOI:
10.1109/ICMTS.2015.7106123
File:
PDF, 1.49 MB
english, 2015