![](/img/cover-not-exists.png)
[IEEE 2002 IEEE International Ultrasonics Symposium - Munich, Germany (8-11 Oct. 2002)] 2002 IEEE Ultrasonics Symposium, 2002. Proceedings. - Micromechanical bulk acoustic wave resonator
Mattila, T., Oja, A., Seppa, H., Jaakkola, O., Kiihamaki, J., Kattelus, H., Koskenvuori, M., Rantakari, P., Tittonen, I.Year:
2002
Language:
english
DOI:
10.1109/ULTSYM.2002.1193551
File:
PDF, 150 KB
english, 2002