Control of Adhesion Force Between Ceria Particles and...

Control of Adhesion Force Between Ceria Particles and Polishing Pad in Shallow Trench Isolation Chemical Mechanical Planarization

Seo, Jihoon, Moon, Jinok, Bae, Jae-Young, Yoon, Kwang Seob, Sigmund, Wolfgang, Paik, Ungyu
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Volume:
14
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2014.8241
Date:
June, 2014
File:
PDF, 901 KB
english, 2014
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