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Effect of negative bias on the composition and structure of the tungsten oxide thin films deposited by magnetron sputtering
Wang, Meihan, Lei, Hao, Wen, Jiaxing, Long, Haibo, Sawada, Yutaka, Hoshi, Yoichi, Uchida, Takayuki, Hou, ZhaoxiaLanguage:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2015.10.099
Date:
October, 2015
File:
PDF, 1.05 MB
english, 2015